6/19/2012	10:31:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2012	10:31:48 AM	Recipe started at 10:31 AM
6/19/2012	10:31:48 AM	Helium valve closed
6/19/2012	10:31:48 AM	H2 valve closed
6/19/2012	10:31:48 AM	BCl3 valve closed
6/19/2012	10:31:48 AM	PH3 valve closed
6/19/2012	10:31:48 AM	SiCl4 pre valve closed
6/19/2012	10:31:48 AM	SiCl4 post valve closed
6/19/2012	10:31:48 AM	Main Vac valve closed
6/19/2012	10:31:48 AM	Bypass valve closed
6/19/2012	10:31:48 AM	Bubbler valve closed
6/19/2012	10:31:48 AM	Helium MFC set to  0.000000
6/19/2012	10:31:48 AM	H2 MFC set to  0.000000
6/19/2012	10:31:48 AM	BCl3 MFC set to  0.000000
6/19/2012	10:31:48 AM	PH3 MFC set to  0.000000
6/19/2012	10:31:48 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:31:48 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:31:48 AM	Tube furnace set to 0
6/19/2012	10:31:51 AM	H2 valve closed
6/19/2012	10:31:51 AM	BCl3 valve closed
6/19/2012	10:31:51 AM	PH3 valve closed
6/19/2012	10:31:51 AM	SiCl4 pre valve closed
6/19/2012	10:31:51 AM	SiCl4 post valve closed
6/19/2012	10:31:51 AM	Main Vac valve closed
6/19/2012	10:31:51 AM	Bypass valve closed
6/19/2012	10:31:51 AM	Bubbler valve closed
6/19/2012	10:31:51 AM	Helium valve opened
6/19/2012	10:31:51 AM	Helium MFC set to  500.000000
6/19/2012	10:31:51 AM	H2 MFC set to  0.000000
6/19/2012	10:31:51 AM	BCl3 MFC set to  0.000000
6/19/2012	10:31:51 AM	PH3 MFC set to  0.000000
6/19/2012	10:31:51 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:31:51 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:31:51 AM	Tube furnace set to 0
6/19/2012	10:33:04 AM	Helium valve closed
6/19/2012	10:33:04 AM	H2 valve closed
6/19/2012	10:33:04 AM	BCl3 valve closed
6/19/2012	10:33:04 AM	PH3 valve closed
6/19/2012	10:33:04 AM	SiCl4 pre valve closed
6/19/2012	10:33:04 AM	SiCl4 post valve closed
6/19/2012	10:33:04 AM	Main Vac valve closed
6/19/2012	10:33:04 AM	Bypass valve closed
6/19/2012	10:33:04 AM	Bubbler valve closed
6/19/2012	10:33:04 AM	Helium MFC set to  0.000000
6/19/2012	10:33:04 AM	H2 MFC set to  0.000000
6/19/2012	10:33:04 AM	BCl3 MFC set to  0.000000
6/19/2012	10:33:04 AM	PH3 MFC set to  0.000000
6/19/2012	10:33:04 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:33:04 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:33:04 AM	Tube furnace set to 0
6/19/2012	10:33:05 AM	Run finished at 10:33 AM
6/19/2012	10:33:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2012	10:35:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2012	10:35:40 AM	Recipe started at 10:35 AM
6/19/2012	10:35:40 AM	Helium valve closed
6/19/2012	10:35:40 AM	H2 valve closed
6/19/2012	10:35:40 AM	BCl3 valve closed
6/19/2012	10:35:40 AM	PH3 valve closed
6/19/2012	10:35:40 AM	SiCl4 pre valve closed
6/19/2012	10:35:40 AM	SiCl4 post valve closed
6/19/2012	10:35:40 AM	Main Vac valve closed
6/19/2012	10:35:40 AM	Bubbler valve closed
6/19/2012	10:35:40 AM	Bypass valve opened
6/19/2012	10:35:40 AM	Helium MFC set to  0.000000
6/19/2012	10:35:40 AM	H2 MFC set to  0.000000
6/19/2012	10:35:40 AM	BCl3 MFC set to  0.000000
6/19/2012	10:35:40 AM	PH3 MFC set to  0.000000
6/19/2012	10:35:40 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:35:40 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:35:40 AM	Tube furnace set to 0
6/19/2012	10:36:47 AM	Helium valve closed
6/19/2012	10:36:47 AM	H2 valve closed
6/19/2012	10:36:47 AM	BCl3 valve closed
6/19/2012	10:36:47 AM	PH3 valve closed
6/19/2012	10:36:47 AM	SiCl4 pre valve closed
6/19/2012	10:36:47 AM	SiCl4 post valve closed
6/19/2012	10:36:47 AM	Main Vac valve closed
6/19/2012	10:36:47 AM	Bubbler valve closed
6/19/2012	10:36:47 AM	Bypass valve opened
6/19/2012	10:36:47 AM	Helium MFC set to  0.000000
6/19/2012	10:36:47 AM	H2 MFC set to  0.000000
6/19/2012	10:36:47 AM	BCl3 MFC set to  0.000000
6/19/2012	10:36:47 AM	PH3 MFC set to  0.000000
6/19/2012	10:36:47 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:36:47 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:36:47 AM	Tube furnace set to 0
6/19/2012	10:37:47 AM	Helium valve closed
6/19/2012	10:37:47 AM	H2 valve closed
6/19/2012	10:37:47 AM	BCl3 valve closed
6/19/2012	10:37:47 AM	PH3 valve closed
6/19/2012	10:37:47 AM	SiCl4 pre valve closed
6/19/2012	10:37:47 AM	SiCl4 post valve closed
6/19/2012	10:37:47 AM	Bypass valve closed
6/19/2012	10:37:47 AM	Bubbler valve closed
6/19/2012	10:37:47 AM	Main Vac valve opened
6/19/2012	10:37:47 AM	Helium MFC set to  0.000000
6/19/2012	10:37:47 AM	H2 MFC set to  0.000000
6/19/2012	10:37:47 AM	BCl3 MFC set to  0.000000
6/19/2012	10:37:47 AM	PH3 MFC set to  0.000000
6/19/2012	10:37:47 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:37:47 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:37:48 AM	Tube furnace set to 0
6/19/2012	10:37:49 AM	Run finished at 10:37 AM
6/19/2012	10:37:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2012	10:38:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2012	10:38:01 AM	Recipe started at 10:38 AM
6/19/2012	10:38:01 AM	Helium valve closed
6/19/2012	10:38:01 AM	H2 valve closed
6/19/2012	10:38:01 AM	BCl3 valve closed
6/19/2012	10:38:01 AM	PH3 valve closed
6/19/2012	10:38:01 AM	SiCl4 pre valve closed
6/19/2012	10:38:01 AM	SiCl4 post valve closed
6/19/2012	10:38:01 AM	Main Vac valve closed
6/19/2012	10:38:01 AM	Bypass valve closed
6/19/2012	10:38:01 AM	Bubbler valve closed
6/19/2012	10:38:01 AM	Helium MFC set to  0.000000
6/19/2012	10:38:01 AM	H2 MFC set to  0.000000
6/19/2012	10:38:01 AM	BCl3 MFC set to  0.000000
6/19/2012	10:38:01 AM	PH3 MFC set to  0.000000
6/19/2012	10:38:01 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:38:01 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:38:01 AM	Tube furnace set to 0
6/19/2012	10:38:04 AM	H2 valve closed
6/19/2012	10:38:04 AM	BCl3 valve closed
6/19/2012	10:38:04 AM	PH3 valve closed
6/19/2012	10:38:04 AM	SiCl4 pre valve closed
6/19/2012	10:38:04 AM	SiCl4 post valve closed
6/19/2012	10:38:04 AM	Main Vac valve closed
6/19/2012	10:38:04 AM	Bypass valve closed
6/19/2012	10:38:04 AM	Bubbler valve closed
6/19/2012	10:38:04 AM	Helium valve opened
6/19/2012	10:38:04 AM	Helium MFC set to  500.000000
6/19/2012	10:38:04 AM	H2 MFC set to  0.000000
6/19/2012	10:38:04 AM	BCl3 MFC set to  0.000000
6/19/2012	10:38:04 AM	PH3 MFC set to  0.000000
6/19/2012	10:38:04 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:38:04 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:38:04 AM	Tube furnace set to 0
6/19/2012	10:39:18 AM	Helium valve closed
6/19/2012	10:39:18 AM	H2 valve closed
6/19/2012	10:39:18 AM	BCl3 valve closed
6/19/2012	10:39:18 AM	PH3 valve closed
6/19/2012	10:39:18 AM	SiCl4 pre valve closed
6/19/2012	10:39:18 AM	SiCl4 post valve closed
6/19/2012	10:39:18 AM	Main Vac valve closed
6/19/2012	10:39:18 AM	Bypass valve closed
6/19/2012	10:39:18 AM	Bubbler valve closed
6/19/2012	10:39:18 AM	Helium MFC set to  0.000000
6/19/2012	10:39:18 AM	H2 MFC set to  0.000000
6/19/2012	10:39:18 AM	BCl3 MFC set to  0.000000
6/19/2012	10:39:18 AM	PH3 MFC set to  0.000000
6/19/2012	10:39:18 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:39:18 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:39:18 AM	Tube furnace set to 0
6/19/2012	10:39:19 AM	Run finished at 10:39 AM
6/19/2012	10:39:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2012	10:43:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2012	10:43:37 AM	Recipe started at 10:43 AM
6/19/2012	10:43:37 AM	Helium valve closed
6/19/2012	10:43:37 AM	H2 valve closed
6/19/2012	10:43:37 AM	BCl3 valve closed
6/19/2012	10:43:37 AM	PH3 valve closed
6/19/2012	10:43:37 AM	SiCl4 pre valve closed
6/19/2012	10:43:37 AM	SiCl4 post valve closed
6/19/2012	10:43:37 AM	Main Vac valve closed
6/19/2012	10:43:37 AM	Bubbler valve closed
6/19/2012	10:43:37 AM	Bypass valve opened
6/19/2012	10:43:37 AM	Helium MFC set to  0.000000
6/19/2012	10:43:37 AM	H2 MFC set to  0.000000
6/19/2012	10:43:37 AM	BCl3 MFC set to  0.000000
6/19/2012	10:43:37 AM	PH3 MFC set to  0.000000
6/19/2012	10:43:37 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:43:37 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:43:37 AM	Tube furnace set to 0
6/19/2012	10:44:47 AM	Helium valve closed
6/19/2012	10:44:47 AM	H2 valve closed
6/19/2012	10:44:47 AM	BCl3 valve closed
6/19/2012	10:44:47 AM	PH3 valve closed
6/19/2012	10:44:47 AM	SiCl4 pre valve closed
6/19/2012	10:44:47 AM	SiCl4 post valve closed
6/19/2012	10:44:47 AM	Main Vac valve closed
6/19/2012	10:44:47 AM	Bubbler valve closed
6/19/2012	10:44:47 AM	Bypass valve opened
6/19/2012	10:44:47 AM	Helium MFC set to  0.000000
6/19/2012	10:44:47 AM	H2 MFC set to  0.000000
6/19/2012	10:44:47 AM	BCl3 MFC set to  0.000000
6/19/2012	10:44:47 AM	PH3 MFC set to  0.000000
6/19/2012	10:44:47 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:44:47 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:44:48 AM	Tube furnace set to 0
6/19/2012	10:45:48 AM	Helium valve closed
6/19/2012	10:45:48 AM	H2 valve closed
6/19/2012	10:45:48 AM	BCl3 valve closed
6/19/2012	10:45:48 AM	PH3 valve closed
6/19/2012	10:45:48 AM	SiCl4 pre valve closed
6/19/2012	10:45:48 AM	SiCl4 post valve closed
6/19/2012	10:45:48 AM	Bypass valve closed
6/19/2012	10:45:48 AM	Bubbler valve closed
6/19/2012	10:45:48 AM	Main Vac valve opened
6/19/2012	10:45:48 AM	Helium MFC set to  0.000000
6/19/2012	10:45:48 AM	H2 MFC set to  0.000000
6/19/2012	10:45:48 AM	BCl3 MFC set to  0.000000
6/19/2012	10:45:48 AM	PH3 MFC set to  0.000000
6/19/2012	10:45:48 AM	SiCl4 MFC set to  0.000000
6/19/2012	10:45:48 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	10:45:48 AM	Tube furnace set to 0
6/19/2012	10:45:49 AM	Run finished at 10:45 AM
6/19/2012	10:45:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2012	11:02:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/19/2012	11:02:56 AM	Recipe started at 11:02 AM
6/19/2012	11:02:56 AM	Helium valve closed
6/19/2012	11:02:56 AM	H2 valve closed
6/19/2012	11:02:56 AM	BCl3 valve closed
6/19/2012	11:02:56 AM	PH3 valve closed
6/19/2012	11:02:56 AM	SiCl4 pre valve closed
6/19/2012	11:02:56 AM	SiCl4 post valve closed
6/19/2012	11:02:56 AM	Main Vac valve closed
6/19/2012	11:02:56 AM	Bubbler valve closed
6/19/2012	11:02:56 AM	Bypass valve opened
6/19/2012	11:02:56 AM	Helium MFC set to  0.000000
6/19/2012	11:02:56 AM	H2 MFC set to  0.000000
6/19/2012	11:02:56 AM	BCl3 MFC set to  0.000000
6/19/2012	11:02:56 AM	PH3 MFC set to  0.000000
6/19/2012	11:02:56 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:02:56 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:02:56 AM	Tube furnace set to 0
6/19/2012	11:02:57 AM	Helium valve closed
6/19/2012	11:02:57 AM	H2 valve closed
6/19/2012	11:02:57 AM	BCl3 valve closed
6/19/2012	11:02:57 AM	PH3 valve closed
6/19/2012	11:02:57 AM	SiCl4 pre valve closed
6/19/2012	11:02:57 AM	SiCl4 post valve closed
6/19/2012	11:02:57 AM	Main Vac valve closed
6/19/2012	11:02:57 AM	Bubbler valve closed
6/19/2012	11:02:57 AM	Bypass valve opened
6/19/2012	11:02:57 AM	Helium MFC set to  0.000000
6/19/2012	11:02:57 AM	H2 MFC set to  0.000000
6/19/2012	11:02:57 AM	BCl3 MFC set to  0.000000
6/19/2012	11:02:57 AM	PH3 MFC set to  0.000000
6/19/2012	11:02:57 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:02:57 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:02:57 AM	Tube furnace set to 0
6/19/2012	11:03:06 AM	Helium valve closed
6/19/2012	11:03:06 AM	H2 valve closed
6/19/2012	11:03:06 AM	BCl3 valve closed
6/19/2012	11:03:06 AM	PH3 valve closed
6/19/2012	11:03:06 AM	SiCl4 pre valve closed
6/19/2012	11:03:06 AM	SiCl4 post valve closed
6/19/2012	11:03:06 AM	Bypass valve closed
6/19/2012	11:03:06 AM	Bubbler valve closed
6/19/2012	11:03:06 AM	Main Vac valve opened
6/19/2012	11:03:06 AM	Helium MFC set to  0.000000
6/19/2012	11:03:06 AM	H2 MFC set to  0.000000
6/19/2012	11:03:06 AM	BCl3 MFC set to  0.000000
6/19/2012	11:03:06 AM	PH3 MFC set to  0.000000
6/19/2012	11:03:06 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:03:06 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:03:07 AM	Tube furnace set to 0
6/19/2012	11:03:37 AM	H2 valve closed
6/19/2012	11:03:37 AM	BCl3 valve closed
6/19/2012	11:03:37 AM	PH3 valve closed
6/19/2012	11:03:37 AM	SiCl4 pre valve closed
6/19/2012	11:03:37 AM	SiCl4 post valve closed
6/19/2012	11:03:37 AM	Bypass valve closed
6/19/2012	11:03:37 AM	Bubbler valve closed
6/19/2012	11:03:37 AM	Helium valve opened
6/19/2012	11:03:37 AM	Main Vac valve opened
6/19/2012	11:03:37 AM	Helium MFC set to  20.000000
6/19/2012	11:03:37 AM	H2 MFC set to  0.000000
6/19/2012	11:03:37 AM	BCl3 MFC set to  0.000000
6/19/2012	11:03:37 AM	PH3 MFC set to  0.000000
6/19/2012	11:03:37 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:03:37 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:03:37 AM	Tube furnace set to 0
6/19/2012	11:04:07 AM	Helium valve closed
6/19/2012	11:04:07 AM	H2 valve closed
6/19/2012	11:04:07 AM	BCl3 valve closed
6/19/2012	11:04:07 AM	PH3 valve closed
6/19/2012	11:04:07 AM	SiCl4 pre valve closed
6/19/2012	11:04:07 AM	SiCl4 post valve closed
6/19/2012	11:04:07 AM	Bypass valve closed
6/19/2012	11:04:07 AM	Bubbler valve closed
6/19/2012	11:04:07 AM	Main Vac valve opened
6/19/2012	11:04:07 AM	Helium MFC set to  0.000000
6/19/2012	11:04:07 AM	H2 MFC set to  0.000000
6/19/2012	11:04:07 AM	BCl3 MFC set to  0.000000
6/19/2012	11:04:07 AM	PH3 MFC set to  0.000000
6/19/2012	11:04:07 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:04:07 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:04:07 AM	Tube furnace set to 0
6/19/2012	11:04:37 AM	H2 valve closed
6/19/2012	11:04:37 AM	BCl3 valve closed
6/19/2012	11:04:37 AM	PH3 valve closed
6/19/2012	11:04:37 AM	SiCl4 pre valve closed
6/19/2012	11:04:37 AM	SiCl4 post valve closed
6/19/2012	11:04:37 AM	Bypass valve closed
6/19/2012	11:04:37 AM	Bubbler valve closed
6/19/2012	11:04:37 AM	Helium valve opened
6/19/2012	11:04:37 AM	Main Vac valve opened
6/19/2012	11:04:37 AM	Helium MFC set to  20.000000
6/19/2012	11:04:37 AM	H2 MFC set to  0.000000
6/19/2012	11:04:37 AM	BCl3 MFC set to  0.000000
6/19/2012	11:04:37 AM	PH3 MFC set to  0.000000
6/19/2012	11:04:37 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:04:37 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:04:37 AM	Tube furnace set to 0
6/19/2012	11:05:07 AM	Helium valve closed
6/19/2012	11:05:07 AM	H2 valve closed
6/19/2012	11:05:07 AM	BCl3 valve closed
6/19/2012	11:05:07 AM	PH3 valve closed
6/19/2012	11:05:07 AM	SiCl4 pre valve closed
6/19/2012	11:05:07 AM	SiCl4 post valve closed
6/19/2012	11:05:07 AM	Bypass valve closed
6/19/2012	11:05:07 AM	Bubbler valve closed
6/19/2012	11:05:07 AM	Main Vac valve opened
6/19/2012	11:05:07 AM	Helium MFC set to  0.000000
6/19/2012	11:05:07 AM	H2 MFC set to  0.000000
6/19/2012	11:05:07 AM	BCl3 MFC set to  0.000000
6/19/2012	11:05:07 AM	PH3 MFC set to  0.000000
6/19/2012	11:05:07 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:05:07 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:05:08 AM	Tube furnace set to 0
6/19/2012	11:05:38 AM	H2 valve closed
6/19/2012	11:05:38 AM	BCl3 valve closed
6/19/2012	11:05:38 AM	PH3 valve closed
6/19/2012	11:05:38 AM	SiCl4 pre valve closed
6/19/2012	11:05:38 AM	SiCl4 post valve closed
6/19/2012	11:05:38 AM	Bypass valve closed
6/19/2012	11:05:38 AM	Bubbler valve closed
6/19/2012	11:05:38 AM	Helium valve opened
6/19/2012	11:05:38 AM	Main Vac valve opened
6/19/2012	11:05:38 AM	Helium MFC set to  20.000000
6/19/2012	11:05:38 AM	H2 MFC set to  0.000000
6/19/2012	11:05:38 AM	BCl3 MFC set to  0.000000
6/19/2012	11:05:38 AM	PH3 MFC set to  0.000000
6/19/2012	11:05:38 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:05:38 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:05:38 AM	Tube furnace set to 0
6/19/2012	11:06:08 AM	Helium valve closed
6/19/2012	11:06:08 AM	H2 valve closed
6/19/2012	11:06:08 AM	BCl3 valve closed
6/19/2012	11:06:08 AM	PH3 valve closed
6/19/2012	11:06:08 AM	SiCl4 pre valve closed
6/19/2012	11:06:08 AM	SiCl4 post valve closed
6/19/2012	11:06:08 AM	Bypass valve closed
6/19/2012	11:06:08 AM	Bubbler valve closed
6/19/2012	11:06:08 AM	Main Vac valve opened
6/19/2012	11:06:08 AM	Helium MFC set to  0.000000
6/19/2012	11:06:08 AM	H2 MFC set to  0.000000
6/19/2012	11:06:08 AM	BCl3 MFC set to  0.000000
6/19/2012	11:06:08 AM	PH3 MFC set to  0.000000
6/19/2012	11:06:08 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:06:08 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:06:08 AM	Tube furnace set to 0
6/19/2012	11:06:38 AM	H2 valve closed
6/19/2012	11:06:38 AM	BCl3 valve closed
6/19/2012	11:06:38 AM	PH3 valve closed
6/19/2012	11:06:38 AM	SiCl4 pre valve closed
6/19/2012	11:06:38 AM	SiCl4 post valve closed
6/19/2012	11:06:38 AM	Bypass valve closed
6/19/2012	11:06:38 AM	Bubbler valve closed
6/19/2012	11:06:38 AM	Helium valve opened
6/19/2012	11:06:38 AM	Main Vac valve opened
6/19/2012	11:06:38 AM	Helium MFC set to  20.000000
6/19/2012	11:06:38 AM	H2 MFC set to  0.000000
6/19/2012	11:06:38 AM	BCl3 MFC set to  0.000000
6/19/2012	11:06:38 AM	PH3 MFC set to  0.000000
6/19/2012	11:06:38 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:06:38 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:06:38 AM	Tube furnace set to 0
6/19/2012	11:07:08 AM	Helium valve closed
6/19/2012	11:07:08 AM	H2 valve closed
6/19/2012	11:07:08 AM	BCl3 valve closed
6/19/2012	11:07:08 AM	PH3 valve closed
6/19/2012	11:07:08 AM	SiCl4 pre valve closed
6/19/2012	11:07:08 AM	SiCl4 post valve closed
6/19/2012	11:07:08 AM	Bypass valve closed
6/19/2012	11:07:08 AM	Bubbler valve closed
6/19/2012	11:07:08 AM	Main Vac valve opened
6/19/2012	11:07:08 AM	Helium MFC set to  0.000000
6/19/2012	11:07:08 AM	H2 MFC set to  0.000000
6/19/2012	11:07:08 AM	BCl3 MFC set to  0.000000
6/19/2012	11:07:08 AM	PH3 MFC set to  0.000000
6/19/2012	11:07:08 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:07:08 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:07:08 AM	Tube furnace set to 0
6/19/2012	11:07:39 AM	H2 valve closed
6/19/2012	11:07:39 AM	BCl3 valve closed
6/19/2012	11:07:39 AM	PH3 valve closed
6/19/2012	11:07:39 AM	SiCl4 pre valve closed
6/19/2012	11:07:39 AM	SiCl4 post valve closed
6/19/2012	11:07:39 AM	Bypass valve closed
6/19/2012	11:07:39 AM	Bubbler valve closed
6/19/2012	11:07:39 AM	Helium valve opened
6/19/2012	11:07:39 AM	Main Vac valve opened
6/19/2012	11:07:39 AM	Helium MFC set to  20.000000
6/19/2012	11:07:39 AM	H2 MFC set to  0.000000
6/19/2012	11:07:39 AM	BCl3 MFC set to  0.000000
6/19/2012	11:07:39 AM	PH3 MFC set to  0.000000
6/19/2012	11:07:39 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:07:39 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:07:39 AM	Tube furnace set to 0
6/19/2012	11:08:09 AM	Helium valve closed
6/19/2012	11:08:09 AM	H2 valve closed
6/19/2012	11:08:09 AM	BCl3 valve closed
6/19/2012	11:08:09 AM	PH3 valve closed
6/19/2012	11:08:09 AM	SiCl4 pre valve closed
6/19/2012	11:08:09 AM	SiCl4 post valve closed
6/19/2012	11:08:09 AM	Bypass valve closed
6/19/2012	11:08:09 AM	Bubbler valve closed
6/19/2012	11:08:09 AM	Main Vac valve opened
6/19/2012	11:08:09 AM	Helium MFC set to  0.000000
6/19/2012	11:08:09 AM	H2 MFC set to  0.000000
6/19/2012	11:08:09 AM	BCl3 MFC set to  0.000000
6/19/2012	11:08:09 AM	PH3 MFC set to  0.000000
6/19/2012	11:08:09 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:08:09 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:08:09 AM	Tube furnace set to 0
6/19/2012	11:08:39 AM	H2 valve closed
6/19/2012	11:08:39 AM	BCl3 valve closed
6/19/2012	11:08:39 AM	PH3 valve closed
6/19/2012	11:08:39 AM	SiCl4 pre valve closed
6/19/2012	11:08:39 AM	SiCl4 post valve closed
6/19/2012	11:08:39 AM	Bypass valve closed
6/19/2012	11:08:39 AM	Bubbler valve closed
6/19/2012	11:08:39 AM	Helium valve opened
6/19/2012	11:08:39 AM	Main Vac valve opened
6/19/2012	11:08:39 AM	Helium MFC set to  20.000000
6/19/2012	11:08:39 AM	H2 MFC set to  0.000000
6/19/2012	11:08:39 AM	BCl3 MFC set to  0.000000
6/19/2012	11:08:39 AM	PH3 MFC set to  0.000000
6/19/2012	11:08:39 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:08:39 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:08:39 AM	Tube furnace set to 0
6/19/2012	11:09:09 AM	Helium valve closed
6/19/2012	11:09:09 AM	H2 valve closed
6/19/2012	11:09:09 AM	BCl3 valve closed
6/19/2012	11:09:09 AM	PH3 valve closed
6/19/2012	11:09:09 AM	SiCl4 pre valve closed
6/19/2012	11:09:09 AM	SiCl4 post valve closed
6/19/2012	11:09:09 AM	Bypass valve closed
6/19/2012	11:09:09 AM	Bubbler valve closed
6/19/2012	11:09:09 AM	Main Vac valve opened
6/19/2012	11:09:09 AM	Helium MFC set to  0.000000
6/19/2012	11:09:09 AM	H2 MFC set to  0.000000
6/19/2012	11:09:09 AM	BCl3 MFC set to  0.000000
6/19/2012	11:09:09 AM	PH3 MFC set to  0.000000
6/19/2012	11:09:09 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:09:09 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:09:09 AM	Tube furnace set to 0
6/19/2012	11:09:39 AM	H2 valve closed
6/19/2012	11:09:39 AM	BCl3 valve closed
6/19/2012	11:09:39 AM	PH3 valve closed
6/19/2012	11:09:39 AM	SiCl4 pre valve closed
6/19/2012	11:09:39 AM	SiCl4 post valve closed
6/19/2012	11:09:39 AM	Bypass valve closed
6/19/2012	11:09:39 AM	Bubbler valve closed
6/19/2012	11:09:39 AM	Helium valve opened
6/19/2012	11:09:39 AM	Main Vac valve opened
6/19/2012	11:09:40 AM	Helium MFC set to  20.000000
6/19/2012	11:09:40 AM	H2 MFC set to  0.000000
6/19/2012	11:09:40 AM	BCl3 MFC set to  0.000000
6/19/2012	11:09:40 AM	PH3 MFC set to  0.000000
6/19/2012	11:09:40 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:09:40 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:09:40 AM	Tube furnace set to 0
6/19/2012	11:10:10 AM	Helium valve closed
6/19/2012	11:10:10 AM	H2 valve closed
6/19/2012	11:10:10 AM	BCl3 valve closed
6/19/2012	11:10:10 AM	PH3 valve closed
6/19/2012	11:10:10 AM	SiCl4 pre valve closed
6/19/2012	11:10:10 AM	SiCl4 post valve closed
6/19/2012	11:10:10 AM	Bypass valve closed
6/19/2012	11:10:10 AM	Bubbler valve closed
6/19/2012	11:10:10 AM	Main Vac valve opened
6/19/2012	11:10:10 AM	Helium MFC set to  0.000000
6/19/2012	11:10:10 AM	H2 MFC set to  0.000000
6/19/2012	11:10:10 AM	BCl3 MFC set to  0.000000
6/19/2012	11:10:10 AM	PH3 MFC set to  0.000000
6/19/2012	11:10:10 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:10:10 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:10:10 AM	Tube furnace set to 0
6/19/2012	11:10:40 AM	H2 valve closed
6/19/2012	11:10:40 AM	BCl3 valve closed
6/19/2012	11:10:40 AM	PH3 valve closed
6/19/2012	11:10:40 AM	SiCl4 pre valve closed
6/19/2012	11:10:40 AM	SiCl4 post valve closed
6/19/2012	11:10:40 AM	Bypass valve closed
6/19/2012	11:10:40 AM	Bubbler valve closed
6/19/2012	11:10:40 AM	Helium valve opened
6/19/2012	11:10:40 AM	Main Vac valve opened
6/19/2012	11:10:40 AM	Helium MFC set to  20.000000
6/19/2012	11:10:40 AM	H2 MFC set to  0.000000
6/19/2012	11:10:40 AM	BCl3 MFC set to  0.000000
6/19/2012	11:10:40 AM	PH3 MFC set to  0.000000
6/19/2012	11:10:40 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:10:40 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:10:40 AM	Tube furnace set to 0
6/19/2012	11:11:10 AM	Helium valve closed
6/19/2012	11:11:10 AM	H2 valve closed
6/19/2012	11:11:10 AM	BCl3 valve closed
6/19/2012	11:11:10 AM	PH3 valve closed
6/19/2012	11:11:10 AM	SiCl4 pre valve closed
6/19/2012	11:11:10 AM	SiCl4 post valve closed
6/19/2012	11:11:10 AM	Bypass valve closed
6/19/2012	11:11:10 AM	Bubbler valve closed
6/19/2012	11:11:10 AM	Main Vac valve opened
6/19/2012	11:11:10 AM	Helium MFC set to  0.000000
6/19/2012	11:11:10 AM	H2 MFC set to  0.000000
6/19/2012	11:11:10 AM	BCl3 MFC set to  0.000000
6/19/2012	11:11:10 AM	PH3 MFC set to  0.000000
6/19/2012	11:11:10 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:11:10 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:11:10 AM	Tube furnace set to 0
6/19/2012	11:11:40 AM	H2 valve closed
6/19/2012	11:11:40 AM	BCl3 valve closed
6/19/2012	11:11:40 AM	PH3 valve closed
6/19/2012	11:11:40 AM	SiCl4 pre valve closed
6/19/2012	11:11:40 AM	SiCl4 post valve closed
6/19/2012	11:11:40 AM	Bypass valve closed
6/19/2012	11:11:40 AM	Bubbler valve closed
6/19/2012	11:11:40 AM	Helium valve opened
6/19/2012	11:11:40 AM	Main Vac valve opened
6/19/2012	11:11:40 AM	Helium MFC set to  20.000000
6/19/2012	11:11:40 AM	H2 MFC set to  0.000000
6/19/2012	11:11:40 AM	BCl3 MFC set to  0.000000
6/19/2012	11:11:40 AM	PH3 MFC set to  0.000000
6/19/2012	11:11:40 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:11:40 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:11:41 AM	Tube furnace set to 0
6/19/2012	11:12:11 AM	Helium valve closed
6/19/2012	11:12:11 AM	H2 valve closed
6/19/2012	11:12:11 AM	BCl3 valve closed
6/19/2012	11:12:11 AM	PH3 valve closed
6/19/2012	11:12:11 AM	SiCl4 pre valve closed
6/19/2012	11:12:11 AM	SiCl4 post valve closed
6/19/2012	11:12:11 AM	Bypass valve closed
6/19/2012	11:12:11 AM	Bubbler valve closed
6/19/2012	11:12:11 AM	Main Vac valve opened
6/19/2012	11:12:11 AM	Helium MFC set to  0.000000
6/19/2012	11:12:11 AM	H2 MFC set to  0.000000
6/19/2012	11:12:11 AM	BCl3 MFC set to  0.000000
6/19/2012	11:12:11 AM	PH3 MFC set to  0.000000
6/19/2012	11:12:11 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:12:11 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:12:11 AM	Tube furnace set to 0
6/19/2012	11:12:41 AM	H2 valve closed
6/19/2012	11:12:41 AM	BCl3 valve closed
6/19/2012	11:12:41 AM	PH3 valve closed
6/19/2012	11:12:41 AM	SiCl4 pre valve closed
6/19/2012	11:12:41 AM	SiCl4 post valve closed
6/19/2012	11:12:41 AM	Bypass valve closed
6/19/2012	11:12:41 AM	Bubbler valve closed
6/19/2012	11:12:41 AM	Helium valve opened
6/19/2012	11:12:41 AM	Main Vac valve opened
6/19/2012	11:12:41 AM	Helium MFC set to  20.000000
6/19/2012	11:12:41 AM	H2 MFC set to  0.000000
6/19/2012	11:12:41 AM	BCl3 MFC set to  0.000000
6/19/2012	11:12:41 AM	PH3 MFC set to  0.000000
6/19/2012	11:12:41 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:12:41 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:12:41 AM	Tube furnace set to 0
6/19/2012	11:13:11 AM	Helium valve closed
6/19/2012	11:13:11 AM	H2 valve closed
6/19/2012	11:13:11 AM	BCl3 valve closed
6/19/2012	11:13:11 AM	PH3 valve closed
6/19/2012	11:13:11 AM	SiCl4 pre valve closed
6/19/2012	11:13:11 AM	SiCl4 post valve closed
6/19/2012	11:13:11 AM	Bypass valve closed
6/19/2012	11:13:11 AM	Bubbler valve closed
6/19/2012	11:13:11 AM	Main Vac valve opened
6/19/2012	11:13:11 AM	Helium MFC set to  0.000000
6/19/2012	11:13:11 AM	H2 MFC set to  0.000000
6/19/2012	11:13:11 AM	BCl3 MFC set to  0.000000
6/19/2012	11:13:11 AM	PH3 MFC set to  0.000000
6/19/2012	11:13:11 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:13:11 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:13:11 AM	Tube furnace set to 0
6/19/2012	11:13:12 AM	Run finished at 11:13 AM
6/19/2012	11:13:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/19/2012	11:17:03 AM	Main Vac valve closed
6/19/2012	11:17:18 AM	Main Vac valve opened
6/19/2012	11:19:39 AM	Recipe started at 11:19 AM
6/19/2012	11:19:39 AM	Helium valve closed
6/19/2012	11:19:39 AM	H2 valve closed
6/19/2012	11:19:39 AM	BCl3 valve closed
6/19/2012	11:19:39 AM	PH3 valve closed
6/19/2012	11:19:39 AM	SiCl4 pre valve closed
6/19/2012	11:19:39 AM	SiCl4 post valve closed
6/19/2012	11:19:39 AM	Main Vac valve closed
6/19/2012	11:19:39 AM	Bypass valve closed
6/19/2012	11:19:39 AM	Bubbler valve closed
6/19/2012	11:19:39 AM	Helium MFC set to  0.000000
6/19/2012	11:19:39 AM	H2 MFC set to  0.000000
6/19/2012	11:19:39 AM	BCl3 MFC set to  0.000000
6/19/2012	11:19:39 AM	PH3 MFC set to  0.000000
6/19/2012	11:19:39 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:19:39 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:19:39 AM	Tube furnace set to 0
6/19/2012	11:19:42 AM	Helium valve closed
6/19/2012	11:19:42 AM	BCl3 valve closed
6/19/2012	11:19:42 AM	PH3 valve closed
6/19/2012	11:19:42 AM	SiCl4 pre valve closed
6/19/2012	11:19:42 AM	SiCl4 post valve closed
6/19/2012	11:19:42 AM	Main Vac valve closed
6/19/2012	11:19:42 AM	Bypass valve closed
6/19/2012	11:19:42 AM	Bubbler valve closed
6/19/2012	11:19:42 AM	H2 valve opened
6/19/2012	11:19:42 AM	Helium MFC set to  0.000000
6/19/2012	11:19:42 AM	H2 MFC set to  500.000000
6/19/2012	11:19:42 AM	BCl3 MFC set to  0.000000
6/19/2012	11:19:42 AM	PH3 MFC set to  0.000000
6/19/2012	11:19:42 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:19:42 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:19:43 AM	Tube furnace set to 0
6/19/2012	11:20:59 AM	Helium valve closed
6/19/2012	11:20:59 AM	BCl3 valve closed
6/19/2012	11:20:59 AM	PH3 valve closed
6/19/2012	11:20:59 AM	SiCl4 pre valve closed
6/19/2012	11:20:59 AM	SiCl4 post valve closed
6/19/2012	11:20:59 AM	Main Vac valve closed
6/19/2012	11:20:59 AM	Bypass valve closed
6/19/2012	11:20:59 AM	H2 valve opened
6/19/2012	11:20:59 AM	Bubbler valve opened
6/19/2012	11:20:59 AM	Helium MFC set to  0.000000
6/19/2012	11:20:59 AM	H2 MFC set to  500.000000
6/19/2012	11:20:59 AM	BCl3 MFC set to  0.000000
6/19/2012	11:20:59 AM	PH3 MFC set to  0.000000
6/19/2012	11:20:59 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:20:59 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:20:59 AM	Tube furnace set to 0
6/19/2012	11:21:00 AM	Helium valve closed
6/19/2012	11:21:00 AM	BCl3 valve closed
6/19/2012	11:21:00 AM	PH3 valve closed
6/19/2012	11:21:00 AM	SiCl4 pre valve closed
6/19/2012	11:21:00 AM	SiCl4 post valve closed
6/19/2012	11:21:00 AM	Main Vac valve closed
6/19/2012	11:21:00 AM	Bypass valve closed
6/19/2012	11:21:00 AM	H2 valve opened
6/19/2012	11:21:00 AM	Bubbler valve opened
6/19/2012	11:21:00 AM	Helium MFC set to  0.000000
6/19/2012	11:21:00 AM	H2 MFC set to  500.000000
6/19/2012	11:21:00 AM	BCl3 MFC set to  0.000000
6/19/2012	11:21:00 AM	PH3 MFC set to  0.000000
6/19/2012	11:21:00 AM	SiCl4 MFC set to  0.000000
6/19/2012	11:21:00 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:21:00 AM	Tube furnace set to 1000
6/19/2012	11:41:00 AM	Helium valve closed
6/19/2012	11:41:00 AM	BCl3 valve closed
6/19/2012	11:41:00 AM	PH3 valve closed
6/19/2012	11:41:00 AM	SiCl4 pre valve closed
6/19/2012	11:41:00 AM	SiCl4 post valve closed
6/19/2012	11:41:00 AM	Main Vac valve closed
6/19/2012	11:41:00 AM	Bypass valve closed
6/19/2012	11:41:00 AM	H2 valve opened
6/19/2012	11:41:00 AM	Bubbler valve opened
6/19/2012	11:41:00 AM	Helium MFC set to  0.000000
6/19/2012	11:41:00 AM	H2 MFC set to  500.000000
6/19/2012	11:41:00 AM	BCl3 MFC set to  1.000000
6/19/2012	11:41:00 AM	PH3 MFC set to  0.000000
6/19/2012	11:41:00 AM	SiCl4 MFC set to  50.000000
6/19/2012	11:41:00 AM	Bypass solenoid MFC set to  0.000000
6/19/2012	11:41:00 AM	Tube furnace set to 1000
6/19/2012	12:01:00 PM	Helium valve closed
6/19/2012	12:01:00 PM	BCl3 valve closed
6/19/2012	12:01:00 PM	PH3 valve closed
6/19/2012	12:01:00 PM	SiCl4 pre valve closed
6/19/2012	12:01:00 PM	SiCl4 post valve closed
6/19/2012	12:01:00 PM	Main Vac valve closed
6/19/2012	12:01:00 PM	Bypass valve closed
6/19/2012	12:01:00 PM	H2 valve opened
6/19/2012	12:01:00 PM	Bubbler valve opened
6/19/2012	12:01:00 PM	Helium MFC set to  0.000000
6/19/2012	12:01:00 PM	H2 MFC set to  500.000000
6/19/2012	12:01:00 PM	BCl3 MFC set to  0.000000
6/19/2012	12:01:00 PM	PH3 MFC set to  0.000000
6/19/2012	12:01:00 PM	SiCl4 MFC set to  0.000000
6/19/2012	12:01:00 PM	Bypass solenoid MFC set to  0.000000
6/19/2012	12:01:01 PM	Tube furnace set to 750
6/19/2012	12:06:01 PM	H2 valve closed
6/19/2012	12:06:01 PM	BCl3 valve closed
6/19/2012	12:06:01 PM	PH3 valve closed
6/19/2012	12:06:01 PM	SiCl4 pre valve closed
6/19/2012	12:06:01 PM	SiCl4 post valve closed
6/19/2012	12:06:01 PM	Main Vac valve closed
6/19/2012	12:06:01 PM	Bypass valve closed
6/19/2012	12:06:01 PM	Helium valve opened
6/19/2012	12:06:01 PM	Bubbler valve opened
6/19/2012	12:06:01 PM	Helium MFC set to  500.000000
6/19/2012	12:06:01 PM	H2 MFC set to  0.000000
6/19/2012	12:06:01 PM	BCl3 MFC set to  0.000000
6/19/2012	12:06:01 PM	PH3 MFC set to  0.000000
6/19/2012	12:06:01 PM	SiCl4 MFC set to  0.000000
6/19/2012	12:06:01 PM	Bypass solenoid MFC set to  0.000000
6/19/2012	12:06:01 PM	Tube furnace set to 0
6/19/2012	12:26:01 PM	Helium valve closed
6/19/2012	12:26:01 PM	H2 valve closed
6/19/2012	12:26:01 PM	BCl3 valve closed
6/19/2012	12:26:01 PM	PH3 valve closed
6/19/2012	12:26:01 PM	SiCl4 pre valve closed
6/19/2012	12:26:01 PM	SiCl4 post valve closed
6/19/2012	12:26:01 PM	Main Vac valve closed
6/19/2012	12:26:01 PM	Bypass valve closed
6/19/2012	12:26:01 PM	Bubbler valve closed
6/19/2012	12:26:01 PM	Helium MFC set to  0.000000
6/19/2012	12:26:01 PM	H2 MFC set to  0.000000
6/19/2012	12:26:01 PM	BCl3 MFC set to  0.000000
6/19/2012	12:26:01 PM	PH3 MFC set to  0.000000
6/19/2012	12:26:01 PM	SiCl4 MFC set to  0.000000
6/19/2012	12:26:01 PM	Bypass solenoid MFC set to  0.000000
6/19/2012	12:26:01 PM	Tube furnace set to 0
6/19/2012	12:26:02 PM	Run finished at 12:26 PM
6/19/2012	12:40:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2012	12:40:27 PM	Recipe started at 12:40 PM
6/19/2012	12:40:27 PM	Helium valve closed
6/19/2012	12:40:27 PM	H2 valve closed
6/19/2012	12:40:27 PM	BCl3 valve closed
6/19/2012	12:40:27 PM	PH3 valve closed
6/19/2012	12:40:27 PM	SiCl4 pre valve closed
6/19/2012	12:40:27 PM	SiCl4 post valve closed
6/19/2012	12:40:27 PM	Main Vac valve closed
6/19/2012	12:40:27 PM	Bypass valve closed
6/19/2012	12:40:27 PM	Bubbler valve closed
6/19/2012	12:40:27 PM	Helium MFC set to  0.000000
6/19/2012	12:40:27 PM	H2 MFC set to  0.000000
6/19/2012	12:40:27 PM	BCl3 MFC set to  0.000000
6/19/2012	12:40:27 PM	PH3 MFC set to  0.000000
6/19/2012	12:40:27 PM	SiCl4 MFC set to  0.000000
6/19/2012	12:40:27 PM	Bypass solenoid MFC set to  0.000000
6/19/2012	12:40:27 PM	Tube furnace set to 0
6/19/2012	12:40:30 PM	H2 valve closed
6/19/2012	12:40:30 PM	BCl3 valve closed
6/19/2012	12:40:30 PM	PH3 valve closed
6/19/2012	12:40:30 PM	SiCl4 pre valve closed
6/19/2012	12:40:30 PM	SiCl4 post valve closed
6/19/2012	12:40:30 PM	Main Vac valve closed
6/19/2012	12:40:30 PM	Bypass valve closed
6/19/2012	12:40:30 PM	Bubbler valve closed
6/19/2012	12:40:30 PM	Helium valve opened
6/19/2012	12:40:30 PM	Helium MFC set to  500.000000
6/19/2012	12:40:30 PM	H2 MFC set to  0.000000
6/19/2012	12:40:30 PM	BCl3 MFC set to  0.000000
6/19/2012	12:40:30 PM	PH3 MFC set to  0.000000
6/19/2012	12:40:30 PM	SiCl4 MFC set to  0.000000
6/19/2012	12:40:30 PM	Bypass solenoid MFC set to  0.000000
6/19/2012	12:40:31 PM	Tube furnace set to 0
6/19/2012	12:40:36 PM	Helium valve closed
6/19/2012	12:40:36 PM	H2 valve closed
6/19/2012	12:40:36 PM	BCl3 valve closed
6/19/2012	12:40:36 PM	PH3 valve closed
6/19/2012	12:40:36 PM	SiCl4 pre valve closed
6/19/2012	12:40:36 PM	SiCl4 post valve closed
6/19/2012	12:40:36 PM	Main Vac valve closed
6/19/2012	12:40:36 PM	Bypass valve closed
6/19/2012	12:40:36 PM	Bubbler valve closed
6/19/2012	12:40:36 PM	Helium MFC set to  0.000000
6/19/2012	12:40:36 PM	H2 MFC set to  0.000000
6/19/2012	12:40:36 PM	BCl3 MFC set to  0.000000
6/19/2012	12:40:36 PM	PH3 MFC set to  0.000000
6/19/2012	12:40:36 PM	SiCl4 MFC set to  0.000000
6/19/2012	12:40:36 PM	Bypass solenoid MFC set to  0.000000
6/19/2012	12:40:36 PM	Tube furnace set to 0
6/19/2012	12:40:37 PM	Run finished at 12:40 PM
6/19/2012	12:40:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2012	12:43:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2012	12:43:02 PM	Recipe started at 12:43 PM
6/19/2012	12:43:02 PM	Helium valve closed
6/19/2012	12:43:02 PM	H2 valve closed
6/19/2012	12:43:02 PM	BCl3 valve closed
6/19/2012	12:43:02 PM	PH3 valve closed
6/19/2012	12:43:02 PM	SiCl4 pre valve closed
6/19/2012	12:43:02 PM	SiCl4 post valve closed
6/19/2012	12:43:02 PM	Main Vac valve closed
6/19/2012	12:43:02 PM	Bubbler valve closed
6/19/2012	12:43:02 PM	Bypass valve opened
6/19/2012	12:43:02 PM	Helium MFC set to  0.000000
6/19/2012	12:43:02 PM	H2 MFC set to  0.000000
6/19/2012	12:43:02 PM	BCl3 MFC set to  0.000000
6/19/2012	12:43:02 PM	PH3 MFC set to  0.000000
6/19/2012	12:43:02 PM	SiCl4 MFC set to  0.000000
6/19/2012	12:43:02 PM	Bypass solenoid MFC set to  0.000000
6/19/2012	12:43:02 PM	Tube furnace set to 0
6/19/2012	12:44:08 PM	Helium valve closed
6/19/2012	12:44:08 PM	H2 valve closed
6/19/2012	12:44:08 PM	BCl3 valve closed
6/19/2012	12:44:08 PM	PH3 valve closed
6/19/2012	12:44:08 PM	SiCl4 pre valve closed
6/19/2012	12:44:08 PM	SiCl4 post valve closed
6/19/2012	12:44:08 PM	Main Vac valve closed
6/19/2012	12:44:08 PM	Bubbler valve closed
6/19/2012	12:44:08 PM	Bypass valve opened
6/19/2012	12:44:08 PM	Helium MFC set to  0.000000
6/19/2012	12:44:08 PM	H2 MFC set to  0.000000
6/19/2012	12:44:08 PM	BCl3 MFC set to  0.000000
6/19/2012	12:44:08 PM	PH3 MFC set to  0.000000
6/19/2012	12:44:08 PM	SiCl4 MFC set to  0.000000
6/19/2012	12:44:08 PM	Bypass solenoid MFC set to  0.000000
6/19/2012	12:44:08 PM	Tube furnace set to 0
6/19/2012	12:45:08 PM	Helium valve closed
6/19/2012	12:45:08 PM	H2 valve closed
6/19/2012	12:45:08 PM	BCl3 valve closed
6/19/2012	12:45:08 PM	PH3 valve closed
6/19/2012	12:45:08 PM	SiCl4 pre valve closed
6/19/2012	12:45:08 PM	SiCl4 post valve closed
6/19/2012	12:45:08 PM	Bypass valve closed
6/19/2012	12:45:08 PM	Bubbler valve closed
6/19/2012	12:45:08 PM	Main Vac valve opened
6/19/2012	12:45:08 PM	Helium MFC set to  0.000000
6/19/2012	12:45:08 PM	H2 MFC set to  0.000000
6/19/2012	12:45:08 PM	BCl3 MFC set to  0.000000
6/19/2012	12:45:08 PM	PH3 MFC set to  0.000000
6/19/2012	12:45:08 PM	SiCl4 MFC set to  0.000000
6/19/2012	12:45:08 PM	Bypass solenoid MFC set to  0.000000
6/19/2012	12:45:09 PM	Tube furnace set to 0
6/19/2012	12:45:10 PM	Run finished at 12:45 PM
6/19/2012	12:45:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
